This is a global marketplace for buyers and sellers of used, surplus or refurbished axcelis. I would recommend axcelis technologies to an individual who is interested in working in a culture where. Heraeus noblelights uv research and commercial application pedigree is long and storied from the development of the worlds first uv radiation source in 1890 to the first microwavepowered uv curing lamp in 1971. With hundreds of support engineers worldwide, we have the capabilitiesand the commitmentto meet your production goals and maximize the return on. Used and preowned uv exposure and uv bake semiconductor fab. Operating in the power class of 600 wattsinch, the light hammer 10 features two easytoservice modular components. Check our similar products below, use our search feature to find more products available for sale or contact us with any questions you might have. Axcelis fusion gemini ges ag semiconductor services.
Fusion uv systems, headquartered in maryland, usa, is a leading global manufacturer of industrial uv curing systems. Ab233 introduction the axcelisfusion gemini series ashers are plasma ashers that were designed to remove the photoresist layer from an etched wafer. Comparison of toc instruments, uvpersulfate analyzer vs combustion for analysis of hard to oxidize compounds substances. Axcelis fusion200 pcuphotoresist stabilizing system uv. Axcelis launches rapidcure ce advanced charge erase.
Axcelis purion xe high energy implanter selected by. We make semiconductor manufacturing more productive every day. If you are looking to buy or sell second hand axcelis fusion, please visit. Axcelis is dedicated to developing enabling process applications through the design, manufacture and complete life cycle support of ion implantation systems, one of the most critical and enabling. The f600 modular 10inch lamp system operates at 600 wattsinch level, but increases uv output above previous benchmarks of 300 to 400 wattsinch with no reduction of warranted bulb life. Fusion f300sq installation, operation and maintenance manual. With seven units in the range, the uv swim i has one of the largest validation envelopes available. Acls today introduced rapidcure ce for 300mm device manufacturing. Axcelisfusion gemini series ashers used watlow 988 temperature controllers to monitor and control the temperature. Its condition is used, second hand, surplus, or refurbished. Heraeusfusion uv f600 series the f600s uv lamp system from fusion uv systems is a major advance in uv curing lamp technology. Microwave spare parts for 6 units designed to replace.
Application bulletin ics ics electronics division of systems west inc. Axcelis fusion fusion gemini photostabilizer gps uv cure. The company was founded in 1971 with the invention of microwavepowered uv curing systems. At the heart of fusion uvs technology is the electrodeless bulb mounted in an elliptical reflector for focusing an intense strip of. We have evolved from buying and selling equipment to helping companies refurbish, service, relocate and audit their manufacturing equipment. Axcelis announces completion of reverse stock split. Specialty electronic materials and sensors cleanroom. Click on any listed item of uv baking fab equipment to see further data. We can supply used semiconductor equipment in excellent working condition including refurbishment and installation. The electrodeless bulb generally comprises an envelope formed of an ultrapure andor lowdefect quartz material and an ultraviolet andor vacuum ultraviolet emissive material contained therein. At bridge tronic, we have an axcelis fusion 200 pcu photoresist stabilizing system uv cure available for sale.
Service and savings uv process supply is your alternative source for microwave parts used in. Axcelisfusion 200pcup pcup5112 photostabilizer uv bake. Axcelis fusion m200pcu uv bake for sale fabsurplus. Video 2 of 2 axcelis fusion 200 pcu polo photostabilizer. Specialty electronic materials and sensors cleanroom paul sunal, ph. To request a live inspection, please contact glenn shows at 4806944681, or tom marshall at 3603493428. When a uv lamp stops curing within the uv system, its generally down to a number of common occurrences. Today, fusion uv systems are the worlds largest manufacturer of uv equipment and systems to customers around the world. Axcelis fusion gemini ges tool id m9ege201 oemmodel axcelis fusion gemini ges serial number ges0014 process etch ashing vintage january, 2005 wafer size 200 mm ag semiconductor services email protected. Hardware configuration fab description main system photos fusbk18. Specialty electronic materials and sensors cleanroom semasc paul sunal, ph.
All bidders residing outside of the united states or canada are required to submit via wire transfer a qualifying deposit of 25% of their total expected purchases. At the heart of fusion uv s technology is the electrodeless bulb mounted in an elliptical reflector for focusing an intense strip of. Rapid thermal process refurbished axcelis fusion spare parts. Fusion axcelis 203669 lollipop microwave uv mod h lamp. This website uses cookies so that we can provide you with the best user experience possible. Bridge tronic is a worldclass provider of semiconductor capital manufacturing equipment and related services in the secondary market. If the input voltage does not match, contact fusion uv systems.
Fusion uv systems, inc new echnology whitehall tech. Axcelis fusion 200 uv resist curing tool three wet benches with spinners, hot plates, and ovens for manual. Gasonics aura 2000 plasma asher equipment for 8 inch wafer. Tell us about your semiconductor fab challenges and let axcelis show you how to improve precision, purity and. General description eqpt id vendor supplier model b.
Total organic carbon analysis for purified water and water for injection. A resource for semiconductor manufacturers po box 217 leander, tx usa 786460217. Axcelis fusion gemini polo fusion gemini uv,high intensity. Labels are located on the rear of the power supply. Asm epsilon,asm nitrox fumer, silicon star 8,atotech uniplate p, axcelis rapidstrip 210, axcelis fusion asher wsi,200a,200 ac,200 ach,200 mcu,200 acu,202 acu,202 a,g03, gemini. These general issues result in decreased output of uv light intensity, primarily due to the deterioration of the lamp and the transparency of the quartz body. Our awardwinning global support and innovation organization has unmatched expertise in every aspect of ion implantation.
Axcelis ion implantation systems, built on our nextgen purion platform, delivers precision, purity, and productivity with the lowest cost of ownership. The branson ipc 3000 is a barrel plasma etcher that uses oxygen to etch organic films and residues such as photoresist in a process commonly referred to as descumming. Deep uv photostabilizer description axcelis 200 pcu pu0e429a. Axcelis fusion semiconductor systems m150200 uv probe.
Axcelis purion xe high energy implanter selected by leading chipmaker for advanced nand flash device development dynamic growth in advanced flash devices drives need for more precise doping. The product utilizes medium pressure lamps, allowing for a small footprint and compact design. Axcelis fusion gemini photostabilizer gps uv cure system, 8 two 8 open cassette stations process chamber mwave ps. Pefxe 200 mm graphite 17394560 1 9 99728 strike plate, pefxe graphite 170010550 1. Axcelis fusion m200 pcu photostabilization system single chamber duv photostabilizer wafer size. Deposit must be received and confirmed prior to start of auction, and can take up to 48 hours to clear. Axcelis fusion gemini photostabilizer gps uv cure system, 8.
Cookie information is stored in your browser and performs functions such as recognising you when you return to our website and helping our team to understand which sections of the website you find most interesting and useful. This document is for reference only axcelis gsd ultra pm report 100308. If you are looking to buy or sell second hand axcelis, please visit equipmatching. A key advantage of axcelis solutions is the support team behind them. To see any eu reach substance of very high concern svhc that may be contained within an axcelis part, please enter a valid part number below and click the search button. An improved electrodeless lamp for emitting ultraviolet andor vacuum ultraviolet radiation is provided herein.
Equipment manual contents university of california, berkeley. Axcelis fusion gemini polo fusion gemini uv,high intensity sourced uvbake for resist photostabilization,dual chamber, dual cassette,insitu irradiance monitoring and feed back. The uv swim i series from aquionics is now fully compliant with the usepa disinfection guidance manual, and local state guidelines. Actual line voltage must be within 10% of the voltage rating shown on the equipment label. Please call sos if you have any questions concerning this lamp. During a normal run for the branson barrel etcher, the chamber is evacuated to under 0.
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